Introduction to lithography

Category General
Difficulty Level Normal
Audience Level General
Description The term nanoelectronics refers to the use of nanotechnology in electronic components. These components are often only a few nanometers in size. This course is allocated to nanoelectronics.
Overview
Nanoelectronics consist of a diverse set of devices and materials in small size. Physical effects alter materials' properties in nanoscale – inter-atomic interactions and quantum mechanical properties play a significant role in the function of these devices. Quantum effects such as tunneling and atomistic disorder dominate the characteristics of these nanoscale devices.

On the other hand, researches on improvements of electronics such as display, size, and power consumption of the device for practical use is known as nanoelectronics. This includes research on memory chips and physical surface modifications on electronic devices.


Booklet
Description
It states that in this stage, the substrate is ready for producing the desired devices. It introduces lithography as an important method. It talks about its advantages. How it is set. Then it talks about different parameters such as resolution, it gives some details and talks about the uses of this method.

Mental Challenge
Today, all ICs are practically produced by lithography. Why?

Quizzes and Activities
.Activity: Research the advantages and disadvantages of lithography.

Further Reading Sources
1.https://www.osti.gov/biblio/1115031