PECVD Method

Bottom-Up approach
Category General
Difficulty Level Normal
Audience Level General
Description Top-down and bottom-up methods are two approaches used in nanofabrication. In this course, synthesis techniques which are known as bottom-up approach are presented.
Overview
Bottom-up approach means a view from bottom(smaller) to top or up(larger). In this technique, a nanometric structure is formed by using methods of assembly or self-assembly. For example: all cells use enzymes to create DNA by taking constituent molecules and binding them together to make the final component. Moreover, the bottom-up approach provides the possibility for creating hierarchical and ordered nanostructures because of physicochemical interactions and self-assembly of molecules.

Booklet
Description
 It starts with an introduction to PECVD as a CVD method, describes the process, gives a brief history, talks about plasma, and plasma produced through electric discharge, the reactors and their different types and ends with a conclusion.
Mental Challenge
 Does PECVD mean that this is a CVD method? How?
Quizzes and Activities
 Activity: As mentioned in the course, PECVD is somewhere between CVD and PVD. Please explain its similarities with and difference from each of these two methods. Provide a table.
Further Reading Sources
 1. https://www.sciencedirect.com/topics/materials-science/plasma-enhanced-chemical-vapor-deposition

2. https://link.springer.com/chapter/10.1007/978-94-009-0071-4_23