Electron Beam Lithography
Category General
Difficulty Level Normal
Audience Level General
Description Top-down and bottom-up methods are two types of approaches used in nanofabrication. In this course, synthesis techniques which are known as top-down approach are presented.
Difficulty Level Normal
Audience Level General
Description Top-down and bottom-up methods are two types of approaches used in nanofabrication. In this course, synthesis techniques which are known as top-down approach are presented.
Overview
Top-down approach means a view from top(larger) to bottom(smaller). This approach is similar to making a statue made of stone. As in making of a statue, a bulk or big piece of stone is taken, similarly in top-down approach; a bulk piece of material is taken. Then carving and cutting is done until desired shape is achieved. Example: Different kinds of lithographic techniques include cutting, etching, grinding and ball milling technique.
In this course, top-down approach is taken into consideration. By the end of this course, students would be able to choose the right technique to achieve desired nanomaterial.
Booklet
Top-down approach means a view from top(larger) to bottom(smaller). This approach is similar to making a statue made of stone. As in making of a statue, a bulk or big piece of stone is taken, similarly in top-down approach; a bulk piece of material is taken. Then carving and cutting is done until desired shape is achieved. Example: Different kinds of lithographic techniques include cutting, etching, grinding and ball milling technique.
In this course, top-down approach is taken into consideration. By the end of this course, students would be able to choose the right technique to achieve desired nanomaterial.
Booklet
Description |
It talks about nanolithography being a top-down method. Goes through scanning electron beam lithography, method, and equipment. And, it ends with a brief history on scanning electron beam lithography. |
Mental Challenge |
How does scanning electron beam lithography work for nano? |
Quizzes and Activities |
Activity: Research the advantages and disadvantages of scanning electron beam lithography vs. photolithography. Prepare a table. |
Further Reading Sources |
1.Limiting Factors in Sub-10 nm Scanning-Electron-Beam Lithography 2.Electron-Beam Lithography towards the Atomic Scale and Applications to nano-optics, chapter 5 |
| Lithography | 09:35 | |
| Photolithography | 11:21 | |
| Electron Beam Lithography | 08:25 | |
| The use of SPM in Nanolithography | 14:42 |